Microphone

MEMS microphone with custom CMOS ASIC.

100dB maximum SPL
Flat response in the voice spectrum
MEMS design on Comsol Multiphysics
CMOS design on Mentor Tanner Tools

Acoustic: 3mm*4.5mm*1mm
Diaphragm: 1µm*Ø2mm
Poly-silicon Diaphragm
700nm CMOS technology




Frequency Response







Capsule







Amplifier


GBP:12.5MHz



Amplifier datasheet






Charge Pump


The charge pump provides a higher DC voltage to polarize the microphone diaphragm.

6 Stage Dickson Charge Pump. 700nm CMOS Technology. 410µm*350µm.

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Copyright © Paulo Pereira, Tiago Aston


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